| 摘要 |
PROBLEM TO BE SOLVED: To provide a method capable of highly accurately manufacturing a superfine extraction electrode. SOLUTION: Press working is performed on metallic foil 11 by a load 294N by a first stage punch 5 and a first stage die 3 by controlling a pressurizing part 7. As a result, a semispherical shell-like first stage projection 12 having a diameter of 0.89 mm and the height not less than 0.1 mm is formed on the metallic foil 11 as shown in a drawing 3(c). Next, a holder 6 is removed from the pressurizing part 7, and instead of it, a holder for holding a second stage punch 8 is installed in the pressurizing part 7. Press working is performed on a tip part of the first stage projection 12 by a load 21.6N by the second stage punch 8 and a second stage die 4 by controlling the pressurizing part 7. As a result, a second stage projection 13 having a diameter of 0.203 mm and the height not less than 0.07 mm is formed on the tip of the first stage projection 12 as shown in a drawing 3(e). A focusing ion beam is irradiated to a top part of the second stage projection 13, and a through hole is opened.
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