| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to reduce an equipment cost and an installation space based on simplification of a table driving device, and avoid a product defect or an equipment failure.SOLUTION: A manufacturing apparatus 10 of a film-coated component W comprises: an upper chamber 1 and a lower chamber 2 which are capable of joining and separating in a vertical direction; vacuum circuits 11,21 and air circuits 12,22 which are connected to each chamber; a heater 3 installed in the upper chamber; a table 4 disposed in the lower chamber in a vertically movable manner; and a table driving device 5 which vertically moves the table, in which the apparatus adheres a film material F, which is heated and softened between the upper chamber and the lower chamber by an atmospheric pressure difference, on a surface of a base material K mounted on the table elevated to a prescribed position. The apparatus also comprises a control part 8 that, after the table is elevated by the table driving device, stops the vacuum circuit 21 of the lower chamber and, at the same time, activates the air circuit 22, and then, stops the vacuum circuit 11 of the upper chamber and, at the same time, activates the air circuit 12.SELECTED DRAWING: Figure 4 |
