发明名称 GAS SUPPLY METHOD AND BOX USING IT
摘要 PROBLEM TO BE SOLVED: To provide a gas supply method that does not cause turbulence in a box having an opening, and does not involve atmospheric oxygen. SOLUTION: In the gas supply method, gas is supplied in to the box 15 through continuous porous bodies (10, 13) having a plurality of fine holes in the gas supply method for introducing the gas into the box 15 where the opening 8 is provided. In the box, the continuous porous bodies (10, 13) having a plurality of fine holes are provided at an inlet in the box. The opening 8 and the inlet 14 of the gas are provided therein.
申请公布号 JP2002158261(A) 申请公布日期 2002.05.31
申请号 JP20000352264 申请日期 2000.11.20
申请人 ASURIITO FA KK 发明人 NAITO KENJI
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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