| 摘要 |
Provided are a manufacturing method of catalyst-free substrate grown graphene and catalyst-free substrate grown graphene. The manufacturing method of catalyst-free substrate grown graphene of the present invention comprises the following steps of: a. arranging a metal layer on a substrate; b. providing an etching gas and a carbon-containing gas, and conducting metal organic chemical vapor deposition (MOCVD); c. supplying an etching gas for the catalyst-free layer when supplying the carbon-containing gas, and growing graphene on the catalyst-free layer; and d. continuously conducting MOCVD from the process of the step c, and growing graphene on the substrate without the catalyst-free layer by continuously removing all of the catalyst-free layer by the etching gas. |
