A METHOD OF FABRICATING A CANTILEVER STRUCTURE AND A CANTILEVER STRUCTURE
摘要
<p>A method of fabricating a cantilever structure and a cantilever structure is provided. The method comprises the steps of providing a self-aligning marker on a beam of the cantilever structure; and forming a tip of the cantilever structure based on self-aligning a tip material at the self-aligning marker.</p>
申请公布号
WO2010011186(A1)
申请公布日期
2010.01.28
申请号
WO2009SG00259
申请日期
2009.07.22
申请人
AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH;LOKE, YEE CHONG;YEONG, KUAN SONG;COX, ERIK, JOHANSSON
发明人
LOKE, YEE CHONG;YEONG, KUAN SONG;COX, ERIK, JOHANSSON
