发明名称 |
Low cost integrated out-of-plane micro-device structures and method of making |
摘要 |
Several methods and structures for improving the yield of out-of-plane micro-device structures including springs and coils are described. In one method the springs used to form out-of-plane structures are constrained via a tether to avoid bunching and entanglement. The high yield structure may be used in numerous electronic applications such as filter circuits.
|
申请公布号 |
US2002110757(A1) |
申请公布日期 |
2002.08.15 |
申请号 |
US20010780163 |
申请日期 |
2001.02.09 |
申请人 |
XEROX CORPORATION |
发明人 |
FORK DAVID K.;MEI PING;VAN SCHUYLENBERGH KOENRAAD F. |
分类号 |
G03F7/20;B81B1/00;B81B3/00;B81C1/00;B81C3/00;H01F17/00;H01F17/02;H01F27/00;H01F41/04;H01L21/48;H01L21/60;H01L23/522;H01L27/08;H05K3/40;(IPC1-7):H01F5/00;G03F7/00;H01F27/28;H01G2/00 |
主分类号 |
G03F7/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|