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发明名称
MANUFACTURE OF CMOS SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10326839(A)
申请公布日期
1998.12.08
申请号
JP19980075570
申请日期
1998.03.24
申请人
SHARP CORP
发明人
TAKENAKA MASAHIRO
分类号
H01L21/8238;H01L21/265;H01L27/092;(IPC1-7):H01L21/823
主分类号
H01L21/8238
代理机构
代理人
主权项
地址
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