摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an oxide superconductor capable of efficiently manufacturing the oxide superconductor with excellent crystalline orientation of an oxide superconducting layer, and the oxide superconductor obtained by the same. SOLUTION: The manufacturing method of the oxide superconductor is provided with a first process of forming a first polycrystal thin film 2 on a metal base material 1 by an ion beam assist method, a second process of forming a second polycrystal thin film 3 on the first polycrystal thin film 2 by a pulsed laser deposition method, and a third process of forming the oxide superconducting layer 4 on the second polycrystal thin film 3 by the pulsed laser deposition method. The first polycrystal thin film 2 and the second polycrystal thin film 3 are to be of almost the same composition. A film thickness of the first polycrystal thin film 2 is to be 2μm or less. COPYRIGHT: (C)2005,JPO&NCIPI
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