发明名称 OPTICAL ELEMENT HOLDING STRUCTURE, EXPOSING DEVICE, AND DEVICE MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide an optical element holding structure that reduces eccentric movement of an optical element resulting from an external force, reduces aberration change, and increases resolution. <P>SOLUTION: This optical element holding structure comprises a first holding member for holding an optical element, a second holding member that is positioned on an outer diameter side of the first holding member and holds the first holding member, a third holding member that is positioned on an outer diameter side of the second holding member and holds the second holding member, a plurality of first elastic members that are positioned between radial directions of the first holding member and the second holding member and can elastically deform in the radial direction, and a plurality of second elastic members that are positioned between radial directions of the second holding member and the third holding member and can elastically deform in the radial direction. The first elastic members and second elastic members are arranged in the circumferential direction around the optical axis of the optical element, and the phases of the circumferential direction, around the optical axis of the optical element, of the first elastic members and second elastic members are displaced from each other. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008309903(A) 申请公布日期 2008.12.25
申请号 JP20070155726 申请日期 2007.06.12
申请人 CANON INC 发明人 YOSHIDA SETSUO
分类号 G02B7/02;H01L21/027 主分类号 G02B7/02
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