发明名称 |
CRYSTAL PATTERN FORMING METHOD, PIEZOELECTRIC FILM MANUFACTURING METHOD, PIEZOELECTRIC ELEMENT MANUFACTURING METHOD, LIQUID JETTING HEAD MANUFACTURING METHOD, FERROELECTRIC ELEMENT, AND METHOD FOR MANUFACTURING SAME |
摘要 |
[Problem] To provide a method for forming a crystal pattern on a desired area with a high accuracy. [Solution] This crystal pattern forming method has: an electromagnetic wave absorption layer forming step for forming an electromagnetic wave absorption layer on one surface of a substrate; an amorphous film forming step for forming an amorphous film on the electromagnetic wave absorption layer; a mask forming step for forming, on the other surface of the substrate, an electromagnetic wave blocking mask for blocking electromagnetic waves; and a crystallization step for crystallizing a predetermined region of the amorphous film by irradiating the substrate with electromagnetic waves from the other surface side of the substrate through the electromagnetic wave blocking mask. |
申请公布号 |
WO2016132638(A1) |
申请公布日期 |
2016.08.25 |
申请号 |
WO2015JP85025 |
申请日期 |
2015.12.15 |
申请人 |
RICOH COMPANY, LTD.;CHEN, XIANFENG |
发明人 |
CHEN, XIANFENG |
分类号 |
H01L41/43;B41J2/14;B41J2/16;H01L21/316;H01L41/09;H01L41/113;H01L41/187 |
主分类号 |
H01L41/43 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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