PREPARATION OF PHASE SHIFT MASK WITH PARTIAL TRANSMITTANCE,申请号KR19950047893-传众专利搜索

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发明名称	PREPARATION OF PHASE SHIFT MASK WITH PARTIAL TRANSMITTANCE
摘要
申请公布号	KR0152925(B1)	申请公布日期	1998.10.01
申请号	KR19950047893	申请日期	1995.12.08
申请人	LG SEMICONDUCTOR CO.,LTD	发明人	KIM, SANG-PYO
分类号	G03F1/32;G03F1/28;(IPC1-7):G03F1/14	主分类号	G03F1/32
代理机构		代理人
主权项
地址

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