THIN-FILM CURVATURE MEASUREMENT APPARATUS AND METHOD THEREOF

摘要

An apparatus for measuring of a curvature of a thin film, is adapted to measure the curvature of a thin-film. The apparatus includes a light emitting module, a first optical module, a second optical module, a third optical module, an image capture module, and an image analysis module. The light emitting module emits at least one line laser as an incident light whose cross-sectional shape is a geometric picture formed of lines. The incident light is transmitted through a first optical path formed of the first optical module, and is directed to incident the thin film by the second optical module. The reflected light is reflected by the thin film go through the second optical path, and is directed to transmit through the third optical path by the third optical module, and then is captured by the capture module to form a second geometric picture.

主权项

1. An apparatus for measuring of a curvature of a thin film, comprising:
a light emitting module, emitting at least one line laser as an incident light, the cross-sectional shape of the incident light is a first geometric picture, a first optical module, providing a first optical path for the incident light transmitted a second optical module, providing a second optical path for the incident light from the first optical path to the thin film, guiding a reflected light from the thin film, wherein the cross-sectional shape of the reflected light is at least one characteristic of a second geometric picture, a third optical module, providing a third optical path for the reflected light transmitted after the second optical path, an image capture module, capturing the reflected light from the end of the third optical path, and determining a curvature of the thin film according to the at least one characteristic of the second geometric picture; and wherein the at least one characteristic is selected from one of a length in different axis, a distance between at least one pair of parallel lines, a circumference, and an area of the second geometric picture.