发明名称 |
Single crystal pulling apparatus |
摘要 |
A single crystal pulling apparatus comprising: a gas tight container, a double crucible for storing a semiconductor melt inside the gas tight container comprising an outer crucible and an inner crucible which are connected at a lower edge, and source material supply means for adding source material to the semiconductor melt at a position between the outer crucible and the inner crucible, characterized in that a flow restriction member is provided inside the semiconductor melt region between the outer crucible and the inner crucible for restricting the flow of the semiconductor melt.
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申请公布号 |
US5871581(A) |
申请公布日期 |
1999.02.16 |
申请号 |
US19970781841 |
申请日期 |
1997.01.10 |
申请人 |
MITSUBISHI MATERIALS SILICON CORPORATION;MITSUBISHI MATERIALS CORPORATION |
发明人 |
ATAMI, TAKASHI;TAGUCHI, HIROAKI;FURUYA, HISASHI;KIDA, MICHIO |
分类号 |
C30B15/02;C30B15/12;C30B29/06;C30B29/42;H01L21/208;(IPC1-7):C30B35/00 |
主分类号 |
C30B15/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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