Technique for producing microfluidic sensor

摘要

An electrochemical sensor and method of its production comprising a microfluidic channel and an electronic sensing device on a first substrate, and a second substrate bonded to the first substrate so as to close the microfluidic channel, wherein a functional part of the electronic sensing device is exposed at the surface of the microfluidic channel and wherein the microfluidic channel is formed by embossing. In one embodiment the electronic device is a vertical-channel field-effect transistor.