MONITORING SEMICONDUCTOR DEVICE, METHOD FOR PERFORMING DEEP N-TYPED WELL-CORRELATED (DNW-CORRELATED) ANTENNA RULE CHECK OF INTEGRATED CIRCUIT AND SEMICONDUCTOR STRUCTURE COMPLYING WITH DNW-CORRELATED ANTENNA RULE

摘要

A semiconductor monitoring device includes a substrate, a die seal ring formed on the substrate, a deep n-typed well formed in the substrate under the die seal ring, and a monitoring device electrically connected to the die seal ring. The monitoring device is formed in a scribe line region defined on the substrate. A width of the deep n-typed well is larger than a width of the die seal ring.

主权项

1. A semiconductor monitoring device comprising:
a substrate; a die seal ring formed on the substrate; a deep n-typed well formed in the substrate under the die seal ring; and a monitoring device electrically connected to the die seal ring.