CONCENTRIC BUCKLING BASED VERTICAL PROBE AND ITS FABRICATION METHOD

摘要

The present invention relates to a vertical probe and its fabrication method wherein the vertical probe is configured in a concentric pattern such that large elastic deformation can be made in a vertical direction and a simple fabrication process can also be performed. According to the present invention, there is provided a vertical probe for use in testing whether a semiconductor device normally operates by applying an electrical signal to the device, wherein one or more cylindrical structures are arranged in a concentric pattern and are subjected to concentric elastic buckling when longitudinal load is applied thereto.