| 摘要 |
PROBLEM TO BE SOLVED: To provide a distortion inspection method and a distortion inspection device capable of inspecting a distortion direction as well as a distortion amount, and performing fine inspection on a peripheral part, concerning a method for inspecting distortion of a reflecting surface of a mirror or the like such as a plane mirror or a curved surface mirror with higher accuracy than hitherto, and the inspection device. SOLUTION: This device has a projection means for projecting a plurality of parallel line patterns to an inspection object, a reading means for reading reflected parallel line patterns reflected from the inspection object by the parallel line patterns projected by the projection means, a data processing means for operating by comparing measuring pattern data generated based on the reflected parallel line patterns by the reading means with reference pattern data determined beforehand, and a determination means for determining the state of the inspection object based on a result by the data processing means. COPYRIGHT: (C)2008,JPO&INPIT
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