| 摘要 |
PURPOSE:To complete a regenerating cycle in a short time by installing a regenerating nozzle which performs a gas purge on a gaseous molecule adsorption plate face in a cryopump uniformly. CONSTITUTION:The purge gas fed out of a purge gas intake 1 is carried up to the vicinity of each side of a 15K cryopanel 3 and an 80K shield 4 by an inlet pipe 2, and it is blown toward both sides of the 15K cryopanel 3 and a cold head 6 from a purge gas blowoff port 5, while the adsorbed gaseous molecule blows between an outer panel 8 and an outer side face of the 80K shield 4 from an 80K baffle 7 by dint of the purge gas, then it is discharged out of an exhaust port 9. Simultaneously, the purge gas out of a purge hole 10 is exhausted to the outside of a pump from the exhaust port 9 as blowing the cold head 6. Thus, since gaseous molecule removal by the purge gas advances quickly, regenerating time is sharply reduced.
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