Surface wave device using increased acoustic wave velocity

摘要

A surface wave device (1) has comb tooth electrodes (3a, 3b, 4a, 4b) in contact with a piezoelectric thin film (2b) formed on a quartz substrate (2a), the piezoelectric thin film thickness being such as to permit production of and device effectiveness with leakage elastic surface waves of a higher order mode. Also claimed is a similar device in which the substrate (2a), the piezoelectric thin film (2b) and the electrodes are designed to generate leakage elastic surface waves of a higher order mode and to prevent attenuation of these waves during transmission. Pref. the piezoelectric thin film consists of ZnO, AlN, Ta2O5 or CdS.