发明名称 LINEAR MOTOR, STAGE APPARATUS AND ALIGNER
摘要 PROBLEM TO BE SOLVED: To provide a linear motor having a construction which is easy to be manufactured. SOLUTION: A stator has a stationary yoke 103 and a stationary coil 104 wound about the stationary yoke 103. A mover has movable magnets 105 arranged on the outside of the stationary yoke 104. The stationary yoke 103, the stationary coil 104, and the movable magnets 105 have four flat planes respectively, and the respective planes have square cross-sections.
申请公布号 JP2003116260(A) 申请公布日期 2003.04.18
申请号 JP20010310052 申请日期 2001.10.05
申请人 CANON INC 发明人 KORENAGA NOBUSHIGE
分类号 G12B5/00;H01L21/027;H02K1/06;H02K1/20;H02K9/19;H02K41/02;H02K41/03;(IPC1-7):H02K41/03 主分类号 G12B5/00
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