| 摘要 |
PURPOSE: To enable scanning atom beam in a wide range at a low equipment cost and operation cost by forming a sliding opening at the inlet and/or outlet of a neutralizing room. CONSTITUTION: The ion beam I from a ion source receives variable electric field and magnetic field in a bead scan device 3 and a bend part 2 and scanned so as to reciprocally move along a long hole of the orifice of neutralizing room 7. On the other hand, a shield plate 14 also rotates in the same speed and the same period as that of reciprocal motion, and so the opening common to the orifice and slit moves so that the scanning beam is always in the same position. In the neutralization room 7, inert gas comes from a supply pipe 15 into a high pressure room 5 and circulated with a pump 17 from the high pressure room 5→orifice→plate 14, common opening between slits→gas cells 4, 6→pump 17→return pipe→supply pipe→room 5. Thus, gas consumption is reduced and cost and man power are also reduced. Remaining ion is removed out of the system with a removing device 8, atom ray A goes straight and by fully scanning the rotating target 11, doping of the base is performed.
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