Laser beam position detector for measurement applications - has beam splitters, mirror reference beam folding and position sensitive sensors

摘要

A laser beam position detection arrangement contains a beam splitter in the beam path which divides the beam into a useful and a reference beam. A further splitter and position sensitive sensor are arranged in the useful or reference beam. The reference beam is multiply folded by a mirror system followed by a second position sensitive sensor. An evaluation unit determines the changes in direction or parallel motion of the laser beam from the outputs of the sensors. USE/ADVANTAGE - Measurement applications. Achieves high resolution with minimal size and is practically unaffected by disturbing influences such as air turbulence.