| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for laser plasma X-ray spectroscopic analysis capable of identifying and measuring a quantity of a minute element in a sample. SOLUTION: A sample stage 2 is housed in a sample chamber 1, while a sample 3 is placed on the sample stage 2. The inside of the sample chamber 1 is vacuated by means of a vacuum exhausting device 10, while pulse laser beams 5 from a laser beam source 4 are converged by means of a converging lens 7 and made to irradiate the sample 3. In irradiation by the pulse laser beams 5, plasma 13 is generated in the sample 3, and an X-ray 14 is generated from the plasma 13. The X-ray 14 is taken into an X-ray spectrometer 8 so as to be dispersed, while the dispersed X-ray 14 is detected by means of an X-ray detector 9. A data processor 12 extracts an emission line peak of a light element contained in the sample 3 from the X-ray data detected by means of the X-ray detector 9 so as to compute its concentration.
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