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发明名称
APPARATUS AND METHOD FOR WASHING SUBSTRATE
摘要
申请公布号
JPH02281733(A)
申请公布日期
1990.11.19
申请号
JP19890103842
申请日期
1989.04.24
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
YONEDA TADANAKA
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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