FLEXIBLE SENSOR APPARATUS

摘要

A sensor apparatus including a flexible substrate and a wrinkled conductor disposed on the flexible substrate. In some embodiments, the conductor includes micro-scale invaginations. Also disclosed are methods of making a sensor apparatus, including: placing a a mask over a polymeric sheet, wherein the mask is configured to block regions of the polymeric sheet, depositing a conductive structure on the polymeric sheet at regions exposed through the mask, shrinking the polymeric sheet with conductive structure patterned on its surface by heating, and transferring the conductive structure to a flexible substrate