Thin film transistor array substrate, organic light-emitting display apparatus, and method of manufacturing the thin film transistor array substrate

摘要

A thin film transistor array substrate includes a thin film transistor including a first gate electrode, an active layer, a source electrode, and a drain electrode. A first conductive layer pattern is on a same layer as the source electrode and the drain electrode and formed of a same material as the source electrode and the drain electrode. An insulating layer is on the first conductive layer pattern and has an opening exposing a patterning cross-section of the first conductive layer pattern. A pixel electrode is on the insulating layer and is coupled to the source electrode or the drain electrode through a contact hole passing through the insulating layer. A diffusion prevention layer covers the patterning cross-section of the first conductive layer pattern and inclined side surfaces of the insulating layer exposed through the opening.

主权项

1. A thin film transistor array substrate comprising:
a thin film transistor comprising a gate electrode, an active layer, a source electrode, and a drain electrode; a first conductive layer pattern on a same layer as the source electrode and the drain electrode and formed of a same material as the source electrode and the drain electrode; an insulating layer on the first conductive layer pattern, the insulating layer having an opening exposing a patterning cross-section of the first conductive layer pattern; a pixel electrode on the insulating layer and coupled to either the source electrode or the drain electrode through a contact hole passing through the insulating layer; and a diffusion prevention layer covering the patterning cross-section of the first conductive layer pattern and inclined side surfaces of the insulating layer exposed through the opening.