发明名称 半導体装置の製造方法、及び、封止用シート
摘要 This production method for a semiconductor device is provided with: a step (A) for preparing a stacked body in which a semiconductor chip is fixed upon a support body; a step (B) for preparing a sealing sheet provided with a hard layer having a minimum melt viscosity at 25-200˚C of at least 10000 Pa∙s, and an embedding resin layer having a minimum melt viscosity at 25-200 ˚C within the range of 50-9000 Pa∙s; a step (C) in which the semiconductor chip is embedded in the embedding resin layer of the sealing sheet to form a sealed body in which the semiconductor chip is embedded in the sealing sheet; and a step (D) which is performed after step (C), and in which the sealing sheet is thermally cured.
申请公布号 JP6066856(B2) 申请公布日期 2017.01.25
申请号 JP20130160260 申请日期 2013.08.01
申请人 日東電工株式会社 发明人 志賀 豪士;盛田 浩介;飯野 智絵;石坂 剛
分类号 H01L23/29;C09K3/10;H01L21/60;H01L23/12;H01L23/14;H01L23/31 主分类号 H01L23/29
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