PRECURSOR COMPOSITION, PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR PRODUCING PRECURSOR COMPOSITION, CURED FILM, METHOD FOR PRODUCING CURED FILM, AND SEMICONDUCTOR DEVICE

摘要

Provided are: a photosensitive resin composition having a wide exposure latitude; a precursor composition for providing this photosensitive resin composition; a method for producing a precursor composition; a cured film; a method for producing a cured film; and a semiconductor device. A precursor composition which contains at least one heterocycle-containing polymer precursor, and wherein: the heterocycle-containing polymer precursor is selected from among polyimide precursors and polybenzoxazole precursors; and the degree of dispersion, which is expressed by (weight average molecular weight)/(number average molecular weight) of the heterocycle-containing polymer precursor, is 2.5 or more.