ULTRAVIOLET RAY RADIATION DEVICE, ULTRAVIOLET RAY RADIATION METHOD, SUBSTRATE PROCESSING DEVICE, AND PRODUCTION METHOD OF SUBSTRATE PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an ultraviolet ray radiation device, an ultraviolet ray radiation method, a substrate processing device, and a production method of a substrate processing device, capable of suppressing bending of a substrate and radiating an ultraviolet ray.SOLUTION: The ultraviolet ray radiation device of the invention comprises: a substrate movement mechanism for moving in a first direction in a state of holding a rectangular substrate; and a radiation part for radiating an ultraviolet ray to a lower face of the substrate which moves in the first direction by the substrate movement mechanism. The substrate movement mechanism has a frame-state holding member for holding at least three sides of an outer peripheral edge part on the lower face of the substrate.SELECTED DRAWING: Figure 1