发明名称 流量センサおよびその製造方法
摘要 When an exposed part of a semiconductor chip is reduced in size, a tendency of development of a crack on the semiconductor chip is suppressed. A pressure of injection of a resin MR into a second space creates a gap on a contact part SEL where an elastic film LAF and a semiconductor chip CHP1 are in contact, and a resin MR2 different in constituent from the resin MR infiltrates into the gap. As a result, in an area of semiconductor chip CHP1 that is exposed from the resin MR, the resin MR2 is formed in an area other than a flow detecting unit FDU and an area around it. Hence, an area of semiconductor chip CHP1 that is exposed from the resins MR and MR2 can be reduced in size.
申请公布号 JP5916637(B2) 申请公布日期 2016.05.11
申请号 JP20130003977 申请日期 2013.01.11
申请人 日立オートモティブシステムズ株式会社 发明人 河野 務;半沢 恵二;徳安 昇;田代 忍;中土 裕樹
分类号 G01F1/684 主分类号 G01F1/684
代理机构 代理人
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