孔形成方法,申请号JP20120147609-传众专利搜索

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发明名称	孔形成方法
摘要
申请公布号	JP5894875(B2)	申请公布日期	2016.03.30
申请号	JP20120147609	申请日期	2012.06.29
申请人	アルバック成膜株式会社	发明人	小島智明
分类号	H01L23/15;B24C1/04;B81C1/00;H01L23/32;H05K3/00	主分类号	H01L23/15
代理机构		代理人
主权项
地址

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