发明名称 TERAHERTZ WAVE DETECTING DEVICE, CAMERA, IMAGING APPARATUS, AND MEASURING APPARATUS
摘要 A terahertz wave detecting device includes: a substrate; a first metal layer that is disposed above the substrate; a pyroelectric layer that is disposed on the first metal layer; and a second metal layer that is disposed on the pyroelectric layer, wherein the second metal layer has a periodic structure in which a unit structure is disposed in a predetermined period, and the pyroelectric layer absorbs terahertz waves being incident on the pyroelectric layer and converts the terahertz waves into heat and converts the converted heat into an electrical signal.
申请公布号 US2016084702(A1) 申请公布日期 2016.03.24
申请号 US201514863371 申请日期 2015.09.23
申请人 SEIKO EPSON CORPORATION 发明人 TOMIOKA Hiroto
分类号 G01J1/42;G01N21/59;H04N5/374;G01N21/55;G01J1/04;H04N5/33 主分类号 G01J1/42
代理机构 代理人
主权项 1. A terahertz wave detecting device comprising: a substrate; a first metal layer that is disposed above the substrate; a pyroelectric layer that is disposed on the first metal layer; and a second metal layer that is disposed on the pyroelectric layer, wherein the second metal layer has a periodic structure in which a unit structure is disposed in a predetermined period, and the pyroelectric layer absorbs terahertz waves being incident on the pyroelectric layer and converts the terahertz waves into heat and converts the converted heat into an electrical signal.
地址 Tokyo JP