发明名称 VERTICAL MICROBOLOMETER CONTACT SYSTEMS AND METHODS
摘要 Systems and methods are directed to vertical legs for an infrared detector. For example, an infrared imaging device may include a microbolometer array in which each microbolometer includes a bridge and a vertical leg structure that couples the bridge to a substrate such as a readout integrated circuit. The vertical leg structure may run along a path that is parallel to a plane defined by the bridge and may be oriented perpendicularly to the plane. The path may be disposed within, below, or above the plane defined by the bridge.
申请公布号 WO2016004408(A3) 申请公布日期 2016.03.24
申请号 WO2015US39138 申请日期 2015.07.02
申请人 FLIR SYSTEMS, INC. 发明人 DALE, JAMES L.;CHAN, CHRISTOPHER;KURTH, ERIC A.
分类号 G01J5/02;G01J5/20 主分类号 G01J5/02
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