Method of surface tension control to reduce trapped gas bubbles

摘要

The embodiments disclose a method of surface tension control to reduce trapped gas bubbles in an imprint including modifying chemistry aspects of interfacial surfaces of an imprint template and a substrate to modify surface tensions, differentiating the interfacial surface tensions to control interfacial flow rates of a pre-cured liquid resist and controlling pre-cured liquid resist interfacial flow rates to reduce trapping gas and prevent trapped gas bubble defects in cured imprinted resist.

主权项

1. A method, comprising:
forming a surface of a patterned imprint template having a first resist flow rate; forming a surface of a substrate having a second resist flow rate, wherein the first and second resist flow rates are differential flow rates selected to avoid trapping gas in a resist by pushing gas toward the imprint template for venting through the patterned recesses of imprint template; dispensing a resist onto the surface of the substrate; imprinting the resist with the imprint template while venting gas through the patterned recesses of the imprint template; and curing the resist to transfer a pattern from the imprint template to the resist, and wherein the patterned recesses of the imprint template form a pattern in the resist.