发明名称 |
Method and apparatus for ultrasonic bonding |
摘要 |
The method involves using transducer bonding tool unit and an ultrasonic generator. The velocity plot measuring signal is determined during bonding, particularly in real time. The velocity plot measuring signal represents temporary-velocity-plot of the tip of the ultrasonic tool in oscillation direction, particularly relative to its oscillation-phase trend. An independent claim is included for a bond device, particularly wire bonder, for production and quality control of ultrasonic bonds. |
申请公布号 |
EP2385545(B1) |
申请公布日期 |
2016.03.02 |
申请号 |
EP20110176310 |
申请日期 |
2008.11.07 |
申请人 |
HESSE GMBH |
发明人 |
HESSE, HANS-JÜRGEN;BRÖKELMANN, MICHAEL;HAGENKÖTTER, SEBASTIAN |
分类号 |
H01L21/66;B23K20/00;H01L21/607 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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