A METHOD OF FABRICATING A TRANSITION METAL CHALCOGENIDE THIN FILM

摘要

A method to manufacture a transition metal chalcogenide thin film includes: a step of providing a substrate with a transition metal film; a step of forming a chalcogen material of a second molecular structure by evaporating a chalcogen source; a step of forming a chalcogen material of a first molecular structure, including a smaller amount of atoms than the second molecular structure, by dissolving the chalcogen material of the second molecular structure; and a step of providing the chalcogen material of the first molecular structure to the transition metal film.