MEMS MICROPHONE CAPABLE OF PREVENTING DIFFUSED REFLECTION OF SOUND IN VIBRATION SPACE

摘要

Disclosed is a micro-electro-mechanical system (MEMS) microphone for preventing diffused reflection of a sound in a vibrating space. The microphone comprises: a metal lead having a vibrating space on a printed circuit board; a vibrating plate installed inside the vibrating space; a preamplifier for amplifying an electric signal generated by the vibrating plate; and a sound absorbing material attached in at least a part of an inner surface of the metal lead, and blocking a sound reflection inside the vibrating space. There are no noise and echo phenomenon that occurred by the sound reflection in the inner surface of the metal lead, especially in a bending unit at the ceiling and the corner. Therefore, the MEMS microphone has significantly increased sound detection and amplification performance.