Compact THz imaging detector with an integrated micro-spectrometer spectral tuning matrix

摘要

A focal plane array (FPA) imaging sensor includes an array of multiple tuning cells disposed on a monolithic substrate, in which each tuning cell includes: (a) a tunable etalon disposed in the monolithic substrate, and (b) a THz detector assembly comprised of at least two antennae disposed in the monolithic substrate. The THz detector assembly is disposed below the tunable etalon. Each tunable etalon includes a Fabry-Pérot interferometer comprised of upper and lower mirrors, spaced by a gap between the mirrors, the gap forming an etalon of the interferometer. The FPA imaging sensor may also be formed as a hybrid, in which portions of the tuning cells are fabricated separately from the THz detector assembly and aligned to each other. The lower mirrors may also be fabricated monolithically with the substrate and the upper mirrors may be formed separately and then aligned to the lower mirrors.

主权项

1. A focal plane array (FPA) comprising:
an array of multiple tuning cells disposed on a monolithic substrate, in which each tuning cell includes: a micro electrical mechanical system (MEMS) tunable etalon disposed in the monolithic substrate, and an array of THz detector assemblies, each THz detector assembly comprising antennas of at least two independent antenna types and a detector disposed in the monolithic substrate, wherein: each type of independent antenna receives a different spectral bandwidth; the array of THz detector assemblies are disposed below the MEMS tunable etalon; each detector provides detection of a signal from a respective antenna type; and the monolithic substrate includes, in layered sequence, (a) the MEMS tunable etalon, (b) the array of THz detector assemblies, including the antennas of the at least two independent antenna types and the detector in each THz detector assembly, and (c) an interconnection layer including amplifiers.