发明名称 SINGLE BATH TYPE CLEANING APPARATUS
摘要 The present invention provides a single bath cleaning device which can reduce the size thereof. According to the present invention, the single bath cleaning device, in a cleaning device for cleaning an object to be cleaned by using a cleaning solution, includes: a cleaning bath with an internal space to hold the cleaning solution, and of which an upper part can be opened; a storing bath in which the cleaning solution is stored. The storing bath is hydrodynamically connected to the cleaning bath, so the cleaning solution can be supplied to the cleaning bath from the storing bath or collected to the storing bath from the cleaning bath.
申请公布号 KR20150145862(A) 申请公布日期 2015.12.31
申请号 KR20140075115 申请日期 2014.06.19
申请人 주식회사 원익큐엔씨 发明人 김영수
分类号 H01L21/302;H01L21/02 主分类号 H01L21/302
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