| 摘要 |
PROBLEM TO BE SOLVED: To provide a testing device connected to a test head, while maintaining a socket board in parallel. SOLUTION: The testing device for testing a device to be tested includes: a test head for generating a test signal for testing the device to be tested; a socket board for transmitting a signal between the test head and the device to be tested by mounting the device to be tested; a plurality of actuators for independently raising and lowering the corresponding support positions respectively by being provided corresponding to respective support positions on the lower face of the socket board, and varying a state in response to a given control signal; and a connection control part for commonly supplying a second control signal for gradually reducing an inter-device distance between the socket board and the test head to each actuator, after supplying a first control signal to each of the actuators so that the actuators are in the same state. COPYRIGHT: (C)2008,JPO&INPIT
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