发明名称 Verfahren zur Erzeugung reversibler Widerstandsschalter in einem PCMO Dünnfilm aufgetragen auf einer hochkristallinen Keimschicht
摘要 A method for obtaining reversible resistance switches on a PCMO thin film when integrated with a highly crystallized seed layer includes: depositing by MOCVD, a seed layer of PCMO thin film, in highly crystalline form, having a thickness of between about 50Å to 300Å, depositing a second PCMO thin film layer on the seed layer by spin coating, having a thickness of between about 500Å to 3000Å, to form a combined PCMO layer; increasing the resistance of the combined PCMO film in a semiconductor device by applying a negative electric pulse of between about -4V to -5V, having a pulse width of between about 75 nsec to 1 µsec; and decreasing the resistance of the combined PCMO layer in a semiconductor device by applying a positive electric pulse of between about +2.5V to +4V, having a pulse width greater than 2.0 µsec,
申请公布号 DE602004015687(D1) 申请公布日期 2008.09.25
申请号 DE20046015687T 申请日期 2004.06.11
申请人 SHARP K.K. 发明人 ZHUANG, WEI-WEI;LI, TINGKAI;EVANS, DAVID RUSSELL;HSU, SHENG TENG;PAN, WEI
分类号 H01L27/04;H01L45/00;H01L21/20;H01L21/822 主分类号 H01L27/04
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