| 发明名称 |
Method of fabricating polymer modulators with etch stop clads |
| 摘要 |
A process that comprises dry etching a trench into a side clad polymer layer using an underlying passive polymer layer as an etch stop, and then back filling the trench with an electro-optic polymer.
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| 申请公布号 |
US7713428(B2) |
申请公布日期 |
2010.05.11 |
| 申请号 |
US20070753052 |
申请日期 |
2007.05.24 |
| 申请人 |
GIGOPTIX, INC. |
发明人 |
LI BING;JIN DANLIANG;DINU RALUCA;YU GUOMIN |
| 分类号 |
B29D11/00 |
主分类号 |
B29D11/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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