| 摘要 |
PROBLEM TO BE SOLVED: To provide a transformer improving efficiency with its size decreased and suppressing eddy current loss. SOLUTION: A core 2 is constituted of: a silicon region 20 which comprises a part of a base body 10 consisting of a silicon substrate 1 with a plurality of blind holes 22 arrayed two-dimensionally in thickness direction of the base body 10; a plurality of magnetic material portions 24 embedded inside of each blind hole 22 in the silicon region 20; and a silicon oxide film 23 interposed between each magnetic material portion 24 and the inner peripheral surface of each blind hole 22. A coil 3 is constituted of: a plurality of linear first wiring 31 installed side by side in length direction of the core 2 on one surface side of the base body 10 so as to intersect with the core 2 in top view; a plurality of linear second wiring 32 installed side by side in length direction of the core 2 on the other surface side of the base body 10 so as to intersect with the core 2 in top view; and a plurality of through wiring 33 which penetrate in the thickness direction of the base body 10 to connect the first wring 31 to the second wiring 32. COPYRIGHT: (C)2011,JPO&INPIT |
