| 摘要 |
<P>PROBLEM TO BE SOLVED: To overcome the problem of a conventional inductively-coupled micro plasma source having the capability of producing a high-density plasma, but difficulty in lighting, and the problem of the known means of adding inside an igniter mechanism for generating initial electrons required for start of ionization, which makes an obstacle to downsizing because it needs additional preparation of a dedicated power source and formation of electrodes and wire connection between the electrodes and the power source. <P>SOLUTION: An inductively-coupled micro plasma source has a floating electrode inside a gas flow passage. Energy can be supplied to the floating electrode without specially designated wire connection because of inductive coupling utilized for micro plasma excitation. Initial electrons necessary for start of ionization can be generated from the electrode. Thus ionization of gas around the floating electrode is accelerated, whereby lighting is facilitated and plasma can be generated with less power. <P>COPYRIGHT: (C)2012,JPO&INPIT |
