| 摘要 |
PROBLEM TO BE SOLVED: To sufficiently support both a warped substrate and a non-warped substrate while vacuum-sucking them, and to also sufficiently support a substrate in which irreversible warpage such as thermal deformation occurs.SOLUTION: Top faces of two branch parts 2 which are provided while being branched from a distal end of a tabular and long base part 1, are flush with a top face of the base part 1, and the branch parts 2 are narrower than the base part 1. On the top face of the base part 1, a circumferential suction hole 11 and a central suction hole 14 are formed and on the top face of each of the branch parts 2, a rubber member 3 is provided and protrudes upward. Regardless of whether warpage occurs, a substrate S is supported at three points in contact with the rubber members 3 while being sucked in the suction holes 11 and 14. |
