| 摘要 |
A cassette stage and a wafer protrusion detecting method are provided to prevent the generation of wafer accidents by alarming previously an abnormal state of a wafer using a wafer protrusion detecting unit. A cassette stage(140) includes a plurality of loading units(40) for loading cassettes. The loading unit is composed of a horizontal support part(12), a vertical support part(11) and a support pedestal(13). The cassette stage further includes an auxiliary support part, a wafer protrusion detecting unit composed of a light emitting part and a light receiving part, a control unit and a display unit. The auxiliary support part is installed on an upper end portion of the uppermost horizontal support part. The light emitting part(14) is installed at the upper horizontal support part of each loading unit and the auxiliary support part. The light receiving part(15) is installed at the lower horizontal support part of each loading unit. The control unit is used for analyzing a predetermined signal received from the light receiving part. The display unit is used for displaying a protruded state of a wafer by the order of the control unit.
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