发明名称 Methods of forming under device interconnect structures
摘要 Methods of forming microelectronic interconnect under device structures are described. Those methods and structures may include forming a device layer in a first substrate, forming at least one routing layer in a second substrate, and then coupling the first substrate with the second substrate, wherein the first substrate is bonded to the second substrate.
申请公布号 GB2526458(A) 申请公布日期 2015.11.25
申请号 GB20150013906 申请日期 2014.03.13
申请人 INTEL CORPORATION 发明人 DON NELSON;M.,CLAIR WEBB;KIMIN JUN;II-SEOK SON
分类号 H01L21/20;H01L21/74;H01L23/522;H01L23/535 主分类号 H01L21/20
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