DEVICE FOR MANUFACTURING POLYSILICON USING HORIZONTAL REACTOR AND METHOD FOR MANUFACTURING SAME

摘要

The present invention provides a polysilicon manufacturing device comprising: a transverse reaction tube positioned inside an insulation tube and configured such that a port for supplying raw material gases, including a reaction gas and a reduction gas, a residual gas discharge port, a reaction surface, with which the raw material gases make contact, and an opening for discharging molten polysilicon, which has been generated by a reaction of the raw material gases, are formed on the bottom surface of the transverse reaction tube; an internal structure installed inside the transverse reaction tube so as to provide an additional reaction surface; and a first heating means for heating the reaction surface of the transverse reaction tube. The present invention also provides a polysilicon manufacturing method using the polysilicon manufacturing device.