Driving system and driving method, exposure apparatus and exposure method, and driving system design method

摘要

At a carriage that shows a resonance mode in opposite phase to a resonance mode shown by a plate table where an interferometer which measures a position (a first controlled variable) of a plate stage driven according to a control input is installed, another interferometer is installed which measures a position (the second controlled variable) of the plate stage. By using the interferometer and the another interferometer, it becomes possible to design a driving system robust in a high bandwidth that drives the plate stage.

主权项

1. A driving system which drives a plant by giving a control input, the system comprising:
a first measuring instrument which measures a first controlled variable related to a position of a first measurement point provided at a first section of the plant; a second measuring instrument which measures a second controlled variable related to a position of a second measurement point provided at a second section of the plant; a controlling section which obtains the control input from a first variable obtained by a control operation using a deviation between a measurement result of the first measuring instrument and a desired value and a second variable obtained by a control operation using a deviation between a measurement result of the second measuring instrument and the desired value, and gives the control input to a control point provided at the plant, wherein in a vibration component related to a resonance mode which appears when a section, from the control point to the first measurement point, of the plant is a rigid body, a first vibration component related to a resonance mode of the first section and a second vibration component related to a resonance mode of the second section are in a relation in opposite phase, and the first and second vibration components cancel out each other.