Apparatus for liquid treatment of work pieces and flow control system for use in same

摘要

A flow control system in an apparatus for treating a work piece controls a flow rate of treatment liquid dispensed from a liquid dispenser. The system includes a flow meter that measures a flow rate of liquid being supplied to the liquid dispenser, a controller that receives signals indicative of a flow rate measured by the flow meter, and a pressure regulator that regulates pressure of the liquid supply downstream of the flow meter based on control signals from the controller. At least two alternative liquid supply paths are provided downstream of the pressure regulator and upstream of an outlet of the liquid dispenser. Each supply path is equipped with a respective shutoff valve and provides a respectively different pressure drop to the treatment liquid.

主权项

1. Apparatus for treating a work piece, comprising:
a holder configured to hold the work piece in a predetermined orientation; a liquid dispenser positioned relative to said holder so as to dispense a treatment liquid onto a surface of the work piece when positioned on said holder; and a flow control system that controls a flow rate of treatment liquid dispensed from said liquid dispenser, said flow control system comprising a flow meter that measures a flow rate of liquid being supplied to said liquid dispenser, a controller that receives signals indicative of a flow rate measured by said flow meter, a pressure regulator that regulates pressure of the liquid supply downstream of the flow meter based on control signals from said controller, and a plurality of liquid supply paths downstream of the pressure regulator and upstream of an outlet of said liquid dispenser, each of said plurality of liquid supply paths being equipped with a respective shutoff valve, wherein the controller is configured to select an appropriate one of shutoff valves with all of the remaining shutoff valves being kept closed to provide a respectively different pressure drop to liquid when passing through a respective one of said plurality of liquid supply paths.